Large-area roll printing and replication forming with curvature control of microlens array structures

被引:0
作者
Yung-Jin Weng
Hau-Jan Lee
机构
[1] National Chiayi University,Department of Mechanical and Energy Engineering
来源
Microsystem Technologies | 2021年 / 27卷
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摘要
This study used flexible polymer materials in large-area roll printing to control the curvature feature size of the microstructure mold array of polydimethylsiloxane (PDMS) through system-developed equipment and gas-assisted molding processing. It designed and developed special roll printing equipment for curvature-adjustable flexible polymer mold for a series of tests regarding material mechanical properties. Mold, wear characteristics, and mechanical property parameters were obtained for experimental simulation, where the optimal parameters of microstructure mold forming with gas-assisted control were simulated. The simulation results were consistent with those in actual roll printing. The preliminary optical testing and applications were carried out, and verified that the innovative continuous roll printing process can obtain good large-area array forming structures.
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页码:3437 / 3445
页数:8
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  • [1] Bleiker SJ(2017)Adhesive wafer bonding with ultra-thin intermediate polymer layers Sens Actu A 260 16-23
  • [2] Dubois V(2016)Study of transfer printing using micro-dynamically-regulated micro-structural flexible mold Optik Int J Light Electron Opt 127 3590-3596
  • [3] Schröder S(2016)The effect of mold materials on the overlay accuracy of a roll-to-roll imprinting system using UV LED illumination within a transparent mold J Micromech Microeng 26 065004-62
  • [4] Stemme G(2016)Additive manufacturing of polymer-derived ceramics Science 351 58-69
  • [5] Niklaus F(2014)Fabrication of transparent and flexible Ag three-dimensional mesh electrode by thermal roll-to-roll imprint lithography J Nanopart Res 16 2500-2086
  • [6] Chen RH(2014)A review of roll-to-roll nanoimprint lithography Nanoscale Res Lett 9 320-1090
  • [7] Weng YJ(2017)A review of thin-film transistors/circuits fabrication with 3D self-aligned imprint lithography Flex Print Electron 2 013002-334
  • [8] Hurng HY(2013)Effects of the process temperature and rolling speed on the thermal roll-to-roll imprint lithography of flexible polycarbonate film J Micromech Microeng 23 035024-undefined
  • [9] Wang YL(2015)UV-curable technique of magnetic roller soft mold and microstructure pattern replication Int Polym Proc 30 63-undefined
  • [10] Tsai CT(2015)The application of magnetic fluid bag micro-roll imprinting technology in optical anti-reflective and solar concentrator soft film replication Optik-Int J Light Electron Opt 126 2080-undefined