Precision engineering

被引：0

作者：

Ralph Delmdahl

机构：

[1] Ralph Delmdahl is product marketing manager of the excimer business unit at Coherent,

[2] Hans-Böckler-Str. 12,undefined

[3] 37079 Göttingen,undefined

[4] Germany. ralph.delmdahl@coherent.com,undefined

来源：

Nature Photonics | 2010年 / 4卷 / 5期

关键词：

D O I：

10.1038/nphoton.2010.106

中图分类号：

学科分类号：

摘要：

The excimer laser is synonymous with precision. Today it is enabling the production of integrated circuits and nextgeneration displays, as well as new breakthroughs in eye surgery.

引用

页码：286 / 286

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