Design and fabrication of high sensitive microphone diaphragm using deep corrugation technique

In this paper, single deeply corrugated diaphragm (SDCD) with various corrugation depths and initial stresses are studied extensively for applications to micromachinined high-sensitivity devices. Both theoretical analysis and finite-element-model (FEM) simulation results show that significant improvement in sensitivity can be achieved using the diaphragm with larger corrugation depth. The measured mechanical sensitivity of the SDCD structure shows reasonable agreement with the theoretical prediction. The SDCD structures with various corrugation depths have been applied to the realization of high-sensitivity microphones. The measurements show that deep corrugation technique is promising in its applications to high-sensitivity devices.