Phase-to-phase perovskite growth transformation in thin PZT films

被引：1

作者：

I. P. Pronin

E. Yu. Kaptelov

S. V. Senkevich

T. A. Shaplygina

V. A. Klimov

V. P. Pronin

机构：

[1] Russian Academy of Sciences,Ioffe Physicotechnical Institite

[2] Herzen State Pedagogical University of Russia,undefined

来源：

Bulletin of the Russian Academy of Sciences: Physics | 2010年 / 74卷 / 9期

关键词：

Perovskite; Perovskite Phase; Lead Oxide; Dielectric Permeability; Thin Film Capacitor;

D O I：

10.3103/S1062873810090340

中图分类号：

学科分类号：

摘要：

The structure and dielectric properties of thin lead zirconate titanate films grown ex situ on Pt/SiO2/Si substrates were studied. It was shown that with a crystallization temperature increase in the range of 540 to 580°C, the mechanism of perovskite phase growth changes and the ferroelectric parameters change according to this transformation.

引用

页码：1304 / 1306

页数：2

共 25 条

[1]

Bruchhaus R.(1999)undefined J. Electroceram. 3 151-undefined

[2]

Pitzer D.(2003)undefined Fiz. Tverd. Tela 45 1685-undefined

[3]

Schreiter M.(1995)undefined Mater. Res. Soc. Symp. Proc. 361 141-undefined

[4]

Wersing W.(1998)undefined Integr. Ferroelectrics 22 525-undefined

[5]

Pronin I.P.(2002)undefined Fiz. Tverd. Tela 44 739-undefined

[6]

Kaptelov E.Yu.(1992)undefined Integr. Ferroelectrics 1 161-undefined

[7]

Gol’tsev A.V.(1994)undefined Jpn. J. Appl. Phys. 33 5240-undefined

[8]

Afanas’ev V.P.(1997)undefined Izv. Akad. Nauk, Ser. Fiz. 61 379-undefined

[9]

Sviridov E.(undefined)undefined undefined undefined undefined-undefined

[10]

Sem I.(undefined)undefined undefined undefined undefined-undefined

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