The Influence of Magnetron Sputtering Conditions on the Structure of Zr–Pd Coatings

被引:0
作者
A. F. Pal
A. N. Ryabinkin
A. O. Serov
机构
[1] Skobeltsyn Institute of Nuclear Physics,
[2] Moscow State University,undefined
来源
Technical Physics Letters | 2020年 / 46卷
关键词
metallic glasses; amorphous metal films; palladium; zirconium; magnetron sputtering.;
D O I
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学科分类号
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页码:725 / 728
页数:3
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