Experimental investigation on the design of nozzle/diffuser for micropumps

被引:0
作者
Shun-Fa Hwang
Ying-Min Ji
机构
[1] National Yunlin University of Science & Technology,Department of Mechanical Engineering
来源
International Journal of Precision Engineering and Manufacturing | 2014年 / 15卷
关键词
Micropump; Nozzle/diffuser; Piezoelectric buzzer; Divergence angle; Slenderness;
D O I
暂无
中图分类号
学科分类号
摘要
To design a planar nozzle/diffuser, its divergence angle and slenderness are experimentally investigated in this work according to the flow rates of the assembled micropumps. Thirteen micropumps with different design of nozzle/diffuser were chosen from the no stall region, transitory region, and bistable steady stall region in a complete stability map of diffuser flow patterns. These micropumps actuated by piezoelectric buzzer were fabricated by UV photolithography. The measured volume flow rates indicate that those micropumps having better performance are located in the transitory region where the flow is strongly unsteady. Among them, the best two nozzles/diffusers occur at the line of the maximum pressure recovery.
引用
收藏
页码:717 / 723
页数:6
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  • [1] Kang J(2011)Simulation and Verification of a Piezoelectrically Actuated Diaphragm for Check Valve Micropump Design Sensors and Actuators A: Physical 167 512-516
  • [2] Auner G W(1998)A Novel Micromachined Pump based on Thick-lm Piezoelectric Actuation Sensors and Actuators A: Physical 70 98-103
  • [3] Koch M(1999)Analytical Modeling of Electrostatic Membrane Actuator for Micro Pumps Journal of Microelectromechanical Systems 8 335-345
  • [4] Harris N(2012)A Numerical Study on the Flow Control and Pumping Characteristics of a Radial Flow Thermo-Pneumatic Micropump with Electromagnetic Resistance Int. J. Precis. Eng. Manuf. 13 103-110
  • [5] Evans A G(2011)Low-Cost High Performance Disposable Micropump for Fluidic Delivery Applications Sensors and Actuators A: Physical 168 187-194
  • [6] White N M(2001)Characteristics and Fabrication of NiTi/Si Diaphragm Micropump Sensors and Actuators A: Physical 93 87-92
  • [7] Brunnschweiler A(1995)Working Principle and Performance of the Dynamic Micropump Sensors and Actuators A: Physical 50 135-140
  • [8] Saif M T A(2004)A Disposable Polydimethylsiloxane-based Diffuser Micropump Actuated by Piezoelectric-Disc Microelectronic Engineering 71 119-124
  • [9] Alaca B E(2001)A Valve-Less Diffuser Micropump for Microfluidic Analytical Systems Sensors and Actuators B: Chemical 72 259-265
  • [10] Sehitoglu H(2012)A Pneumatic PDMS Micropump with in-Plane Check Valves for Disposable Microfluidic Systems Microelectronic Engineering 99 28-32