Multi-electrolyte-step anodic aluminum oxide method for the fabrication of self-organized nanochannel arrays

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作者
Chun-Ko Chen
Sheng-Hui Chen
机构
[1] National Central University,Department of Optics and Photonics
关键词
nanochannel array; multi-electrolyte-step; anodic aluminum oxide;
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摘要
Nanochannel arrays were fabricated by the self-organized multi-electrolyte-step anodic aluminum oxide [AAO] method in this study. The anodization conditions used in the multi-electrolyte-step AAO method included a phosphoric acid solution as the electrolyte and an applied high voltage. There was a change in the phosphoric acid by the oxalic acid solution as the electrolyte and the applied low voltage. This method was used to produce self-organized nanochannel arrays with good regularity and circularity, meaning less power loss and processing time than with the multi-step AAO method.
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