Ion-beam formation and track modification of InAs nanoclusters in silicon and silica

被引：1

作者：

Komarov F.F. ^{[1
,5
]}

Milchanin O.V. ^{[1
,5
]}

Skuratov V.A. ^{[2
]}

Makhavikou M.A. ^{[1
,5
]}

Janse van Vuuren A. ^{[3
]}

Neethling J.N. ^{[3
]}

Wendler E. ^{[4
]}

Vlasukova L.A. ^{[5
]}

Parkhomenko I.N. ^{[5
]}

Yuvchenko V.N. ^{[1
,5
]}

机构：

[1] Sevchenko Institute of Applied Physical Problems, Belarusian State University, Minsk

[2] Joint Institute for Nuclear Research, Dubna

[3] Centre for High Resolution Transmission Electron Microscopy, Nelson Mandela Metropolitan University, Port Elizabeth

[4] Friedrich Schiller University Jena, Jena

[5] Belarusian State University, Minsk

来源：

Bulletin of the Russian Academy of Sciences: Physics | 2016年 / 80卷 / 02期

关键词：

III-V semiconductors - Silica - Irradiation - Indium arsenide - Silicon - Silicon oxides - Xenon - Ions - Ion beams;

D O I：

10.3103/S106287381602012X

中图分类号：

学科分类号：

摘要：

The implantation formation of InAs nanoclusters in silicon and silica and their modification via irradiation with Xe ions with an energy of 167 MeV and a fluence of 3 × 1014 cm–2 are studied. It is found that post-implantation annealing and irradiation with high-energy ions alter the size and shape of nanoclusters and cause structural transformations within them. The ordering of nanoclusters and their elongation along the trajectory of Xe ions in a SiO2 matrix is observed. © 2016, Allerton Press, Inc.

引用

页码：141 / 145

页数：4

共 10 条

[1]

Komarov F., Vlasukova L., Milchanin O., Et al., Nucl. Instrum. Methods Phys. Res., Sect. B, 266, (2008)

[2]

Komarov F.F., Mil'chanin O.V., Vlasukova L.A., Et al., Bull. Russ. Acad. Sci.: Phys., 74, 2, (2010)

[3]

Komarov F., Vlasukova L., Milchanin O., Et al., Mater. Sci. Eng. B, 178, (2013)

[4]

Pruchnal S., Facsko S., Baumgart C., Et al., Nano Lett., 11, (2011)

[5]

Leino A.A., Djurabekova F., Nordlund K., Eur. Phys. J., 87, (2014)

[6]

Vlasukova L.A., Komarov F.F., Yuvchenko V.N., Et al., Bull. Russ. Acad. Sci.: Phys., 76, 5, (2012)

[7]

Schmidt B., Heinig K.-H., Mucklich A., Et al., Nucl. Instrum. Methods Phys. Res., Sect. B, 267, (2009)

[8]

Komarov F.F., Phys.-Usp., 173, 12, (2003)

[9]

Numerical Data and Functional Relationships in Science and Technology, BerlinHeidelberg: Springer-Verlag, 17a, (1982)

[10]

Tenne D.A., Milekhin A.G., Bakarov A.K., Et al., Mater. Res. Soc. Symp. Proc., 737, (2003)

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