On the Precision Preparation of Samples for Atom Probe Tomography Using a Focused Ion Beam in a SEM

被引：3

作者：

Khoroshilov V.V. ^{[1
]}

Korchuganova O.A. ^{[1
]}

Lukyanchuk A.A. ^{[1
]}

Raznitsyn O.A. ^{[1
]}

Aleev A.A. ^{[1
]}

Rogozhkin S.V. ^{[1
,2
]}

机构：

[1] Institute of Theoretical and Experimental Physics NRC “Kurchatov Institute”, Moscow

[2] National Research Nuclear University Moscow Engineering Physics Institute (MEPhI), Moscow

来源：

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2018年 / 12卷 / 1期

关键词：

Atom probe tomography (АРТ); FIB; focused ion beam; sample preparation; scanning electron microscope (SEM);

D O I：

10.1134/S1027451017060106

中图分类号：

学科分类号：

摘要：

Atom probe tomography is a modern and dynamically developing method of material investigation. It allows studies of the structure of matter at the atomic scale. The physical fundamentals of this method require a specific size, shape and conductivity type of the sample. To expand the analytical capabilities of atom probe tomography, a technique for preparing samples using a focused ion beam in a scanning electron microscope is studied and implemented in this work. The basic principles of this approach are demonstrated; its advantages, disadvantages and important practical aspects are described. To protect a fabricated sample from the influence of environment upon its transport to an atom probe tomograph, it is suggested a platinum coating be used. The atom-probe-tomography analysis of samples prepared with a focused ion beam is carried out. The effects of using such a sample preparation technique are studied. © 2018, Pleiades Publishing, Ltd.

引用

页码：87 / 93

页数：6

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