Characteristic Features of the Formation of a Combined Magnetron-Laser Plasma in the Processes of Deposition of Film Coatings

被引：2

作者：

Burmakov A.P. ^{[1
]}

Kuleshov V.N. ^{[1
]}

Prokopchik K.Y. ^{[1
]}

机构：

[1] Belarusian State University, 4 Nezavisimost’ Ave., Minsk

来源：

Journal of Engineering Physics and Thermophysics | 2016年 / 89卷 / 05期

关键词：

arc discharge; combined magnetron-laser plasma; erosion laser plasma; magnetron discharge plasma; optical spectroscopy;

D O I：

10.1007/s10891-016-1491-8

中图分类号：

学科分类号：

摘要：

A block diagram of a facility for combined magnetron-laser deposition of coatings and of the systems of controlling and managing this process is considered. The results of analysis of the influence of the gas medium and of laser radiation parameters on the emission-optical properties of laser plasma are considered. The influence of the laser plasma on the electric characteristics of a magnetron discharge is analyzed. The formation of the laser plasma-initiated pulse arc discharge has been established and the influence of the laser radiation parameters on the electric characteristics of this discharge has been determined. The emission optical spectra of the magnetron discharge plasma and of erosion laser plasma are compared separately and in combination. © 2016, Springer Science+Business Media New York.

引用

页码：1271 / 1276

页数：5

共 7 条

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