InGaN/GaN multiple quantum well green light-emitting diodes prepared by temperature ramping

被引:0
作者
T. C. Wen
S. J. Chang
Y. K. Su
L. W. Wu
C. H. Kuo
W. C. Lai
J. K. Sheu
T. Y. Tsai
机构
[1] National Cheng Kung University,Institute of Microelectronics and Department of Electrical Engineering
[2] South Epitaxy Corporation,Optical Science Center
[3] National Central University,undefined
来源
Journal of Electronic Materials | 2003年 / 32卷
关键词
InGaN/GaN; multiple-quantum well (MQW); green light-emitting diode (LED); PL; reliability;
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中图分类号
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摘要
High-quality InGaN/GaN multiple-quantum well (MQW) light-emitting diode (LED) structures were prepared by a temperature-ramping method during metal-organic chemical-vapor deposition (MOCVD) growth. Two photoluminescence (PL) peaks, one originating from well-sensitive emission and one originating from an InGaN quasi-wetting layer on the GaN-barrier surface, were observed at room temperature (RT). The observation of high-order double-crystal x-ray diffraction (DCXRD) satellite peaks indicates that the interfaces between InGaN-well layers and GaN-barrier layers were not degraded as we increased the growth temperature of the GaN-barrier layers. With a 20-mA and 160-mA current injection, it was found that the output power could reach 2.2 mW and 8.9 mW, respectively. Furthermore, it was found that the reliability of the fabricated green LEDs prepared by temperature ramping was also reasonably good.
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页码:419 / 422
页数:3
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