Surface roughness modulated resistivity in copper thin films

被引:0
作者
HongKang Song
Ke Xia
Jiang Xiao
机构
[1] Beijing Normal University,Department of Physics
[2] Fudan University,Department of Physics and State Key Laboratory of Surface Physics
[3] Collaborative Innovation Center of Advanced Microstructures,undefined
来源
Science China Physics, Mechanics & Astronomy | 2018年 / 61卷
关键词
thin film; thickness dependent; resistivity; surface roughness; 72.10.Fk; 72.15.Eb; 72.15.Lh;
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摘要
The surfaces of metallic thin films are never flat. The resistivity in thin films is very different from that in bulk because of the unavoidable rough surfaces. In this study, we apply a quantum-mechanical method to study the resistivity in metallic thin films. The resulting resistivity formula for metallic thin films merely involves two parameters: bulk relaxation time and surface roughness. We use the formula to fit a large number of experimental data sets for copper thin films obtained using different growing methods. With an additional tuning parameter for calibrating the film thickness, the quantum formula can provide a universal fitting to most data with a satisfactory precision, regardless of their growing methods or data source.
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共 193 条
[1]  
Andricacos P. C.(1998)undefined IBM J. Res. Dev. 42 567-undefined
[2]  
Uzoh C.(2005)undefined J. Appl. Phys. 97 093301-undefined
[3]  
Dukovic J. O.(2011)undefined Surf. Coatings Tech. 205 4582-undefined
[4]  
Horkans J.(2016)undefined ACS Appl. Mater. 8 022337-undefined
[5]  
Deligianni H.(2016)undefined J. Alloys Compd. 692 108-undefined
[6]  
Prater W. L.(2017)undefined Thin Solid Films 643 53-undefined
[7]  
Allen E. L.(2017)undefined Science 357 397-undefined
[8]  
Lee W. Y.(2008)undefined Math. Proc. Camb. Phil. Soc. 34 100-undefined
[9]  
Toney M. F.(1952)undefined Adv. Phys. 50 499-undefined
[10]  
Kellock A.(1970)undefined Phys. Rev. B 1 1382-undefined