Effects of Substrate Bias Voltage on Structural and Optical Properties of Co-Sputtered (AlxGa1–x)2O3 Films

被引：0
作者：
Yan Gao
Haitao Dong
Xiaoke Zhang
Wenran Feng
机构：
[1] Beijing Institute of Petrochemical Technology,Beijing Key Lab of Special Elastomeric Composite Materials, College of New Materials and Chemical Engineering
来源：
Journal of Electronic Materials | 2023年 / 52卷
关键词：
(Al; Ga; ); O; thin films; magnetron co-sputtering; bias voltage; optical properties;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：7429 / 7437
页数：8
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