Complex optical interference filters with stress compensation for space applications

被引：14

作者：

Begou T. ^{[1
]}

Krol H. ^{[2
]}

Stojcevski D. ^{[2
]}

Lemarchand F. ^{[1
]}

Lequime M. ^{[1
]}

Grezes-Besset C. ^{[2
]}

Lumeau J. ^{[1
]}

机构：

[1] Aix Marseille Univ, CNRS, Centrale Marseille, Institut Fresnel, Marseille

[2] CILAS Etablissement de Marseille, 600 Avenue de la Roche Fourcade, Pole ALPHA Sud, Saint Mitre, Aubagne

来源：

CEAS Space Journal | 2017年 / 9卷 / 04期

关键词：

Fabrication technology; Narrow bandpass filters; Optical interference filters; Thin films;

D O I：

10.1007/s12567-017-0149-5

中图分类号：

学科分类号：

摘要：

We present hereafter a study of complex bandpass optical interference filters with central wavelengths ranging in blue region or in the near infrared. For these applications, the required functions are particularly complex as they must present a very narrow bandwidth as well as a high level of rejection over a broad spectral range. Moreover, these components must have a good flatness meaning that the stress induced by the different layers has to be taken in account in the filter design. We present a thorough study of these filters including their design, fabrication using Plasma Assisted Reactive Magnetron Sputtering (PARMS) and characterization. Excellent agreement between experimental and theoretical spectral performances associated with a final sag of 326 and 13 nm, and uniformity from −0.05 to 0.10 and −0.10 to 0.20% are demonstrated for the two manufactured filters. © 2017, CEAS.

引用

页码：441 / 449

页数：8

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