Vacuum gauges with emitters based on carbon nanotubes

被引：0
|
作者：
S. J. Kim
机构：
[1] Kyungnam University,Division of Electronics and Electrical Engineering
来源：
Technical Physics Letters | 2005年 / 31卷
关键词：
Carbon Nanotubes; Field Emission; Vacuum Chamber; Electric Discharge; Pressure Sensor;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
New vacuum gauges with emitters based on carbon nanotubes (CNTs) are described. The relation between the field emission from CNTs and the residual pressure in the vacuum chamber is considered. The operation of the proposed pressure sensor obeys the electric discharge theory based on the Paschen law, whereby the pressure is determined by measuring the discharge current as a function of the concentration of a gas (air) ionized as a result of the collisions with electrons emitted from CNTs.
引用
收藏
页码：597 / 599
页数：2
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