2D hall sensor array for measuring the position of a magnet matrix

Hall sensor array is used to measure the position of a magnet array and needs compensation of errors caused by manufacturing tolerances as well as harmonic components of the magnetic flux of the magnet array. This paper presents a 2D hall sensor array to measure the position of a magnet matrix by filtering harmonic components. First, 1D sensor array to filter out arbitrary number of harmonic signals is proposed and extended to 2D sensor array for the position measurement of a magnet matrix. A 2D hall sensor array for filtering both fundamental and 2nd harmonic components of the magnetic flux and its conditioning circuit board are built to measure the position of the magnet matrix for a planar motor. Finally, performances of filtering harmonics and measuring position of the magnet matrix are experimentally verified with a XY linear motion stage. The proposed 2D hall sensor array is compatible to a sine encoder and is directly applicable to commercial motion controllers.