Thermal Oxidation of Ti and Pb Thin Films Deposited on Single-Crystal Silicon

被引：0

作者：

V. A. Logacheva

E. A. Turenko

A. M. Khoviv

O. B. Yatsenko

机构：

[1] Voronezh State University,

来源：

Inorganic Materials | 2001年 / 37卷

关键词：

Oxidation; Silicon; Titanium; Thin Film; Inorganic Chemistry;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Thin Pb–Ti–O films on single-crystal Si were prepared by magnetron sputtering followed by thermal oxidation of Pb/Ti/Si and Ti/Pb/Si structures. Oxidation of Pb/Ti bilayers was found to yield lead oxides, which then react with Ti to form lead titanate. Ti/Pb bilayers on Si could be converted into stoichiometric lead titanate, through titanium and lead oxides, by oxidation between 870 and 1070 K. Some of the films exhibited ferroelectric properties.

引用

页码：466 / 468

页数：2

共 18 条

[1]

Kang Y.M.(1998)Preparation of Epitaxial PbTiO Thin Solid Films 312 40-45

[2]

Bae S.C.(1996) Thin Films by Pulsed Laser Deposition Ferroelectrics 186 37-40

[3]

Kangki J.(2000)Preparation of PbTiO Fiz. Tverd. Tela 42 727-732

[4]

Baik S.(1998) Films on Conductive Oxide by Reactive Electron Beam Coevaporation Neorg. Mater. 34 462-463

[5]

Mochizuki S.(1994)Preparation and Properties of Ferroelectric Lead Titanate Thin Films Ferroelectrics 152 449-504

[6]

Minara T.(undefined)Preparation of Ferroelectric Lead Titanate Films undefined undefined undefined-undefined

[7]

Ishida T.(undefined)Fabrication and Characterization of Copper Containing Lead Titanate Films Prepared by Sol-Gel Method undefined undefined undefined-undefined

[8]

Sidorkin A.S.(undefined)undefined undefined undefined undefined-undefined

[9]

Sigov A.S.(undefined)undefined undefined undefined undefined-undefined

[10]

Khoviv A.M.(undefined)undefined undefined undefined undefined-undefined

← 1 2 →