共 22 条
[1]
Zhu W.(1996)undefined J. Vac. Sci. Technol. B. 14 2011-2011
[2]
Kochanski G.P.(1995)undefined J. Vac. Sci. Technol. B. 13 418-418
[3]
Jin S.(1995)undefined J. Mater. Synthesis Process 3 39-39
[4]
Seibles L.(1994)undefined J. Appl. Phys. 75 481-481
[5]
Zhirnov V.V.(1994)undefined J. Mater. Sci. Mater. Electron. 5 360-360
[6]
Givargizov E.I.(1987)undefined J. Appl. Phys. 62 2000-2000
[7]
Plekhanov P.S.(1997)undefined J. Vac. Sci. Technol. B. 15 520-520
[8]
Kim W.J.(undefined)undefined undefined undefined undefined-undefined
[9]
Kim D.K.(undefined)undefined undefined undefined undefined-undefined
[10]
Kim C.H.(undefined)undefined undefined undefined undefined-undefined