The Design and Characteristics of a 630-mm Phase-Shifting Interferometer

被引：0

作者：

D. E. Silin

I. E. Kozhevatov

E. H. Kulikova

A. V. Pigasin

S. B. Speransky

S. A. Bel’kov

I. N. Derkach

D. I. Lobachev

I. E. Chernov

机构：

[1] Russian Academy of Sciences,Federal Research Center, Institute of Applied Physics

[2] All-Russia Research Institute of Experimental Physics,Russian Federal Nuclear Center

来源：

Instruments and Experimental Techniques | 2018年 / 61卷

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摘要：

A large-aperture Fizeau interferometer has been developed for measuring the characteristics of optical elements with flat surfaces. The interferometer has two fields of view with dimensions of 630 and 100 mm and with transverse resolutions of 0.63 and 0.1 mm/pixel, respectively. Due to the calibration of the reference plates, the absolute measurement accuracy of the interferometer is λ/1000 RMS (λ = 632.8 nm) on a 630-mm field of view.

引用

页码：393 / 399

页数：6

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