Preparation of Hydrophobic Porous Silicon by Metal-Assisted Etching with Pd-Catalyst

被引：0
作者：
O. V. Volovlikova
S. A. Gavrilov
G. O. Silakov
A. V. Zheleznyakova
A. A. Dudin
机构：
[1] National Research University “Moscow Institute of Electronic Technology”,
[2] Institute of Nanotechnology and Microelectronics,undefined
[3] Russian Academy of Sciences,undefined
来源：
Russian Journal of Electrochemistry | 2019年 / 55卷
关键词：
porous silicon; Pd-assisted etching; dissolution rate; anodic current; wetting angle; superhydrophobicity; surface energy;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：1186 / 1195
页数：9
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