共 74 条
- [1] Ye Y.(1991)Thermophoretic effect of particle deposition on a free standing semiconductor wafer in a clean room Journal of Aerosol Science 22 63-72
- [2] Pui D. Y. H.(1998)Combined effects of thermophoresis and electrophoresis on particle deposition onto a wafer Journal of Aerosol Science 29 811-825
- [3] Liu B. Y. H.(1995)Measurements and control of particle deposition velocity on a horizontal wafer with thermophoretic effect Aerosol Science and Technology 23 321-330
- [4] Opiolka S.(2006)Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface International Journal of Heat and Mass Transfer 49 1395-1402
- [5] Blumhorst S.(2012)Gaussian diffusion sphere model to predict deposition velocity onto wafers in laminar parallel airflow considering thermophoresis The European Physical Journal Plus 127 132-10
- [6] Fissan H.(2012)Statistical Lagrangian particle tracking approach to investigate the effect of thermophoresis on particle deposition onto a face-up flat surface in a parallel airflow Journal of Aerosol Science 44 1-927
- [7] Tsai R.(2015)Local behavior of deposition velocity onto a flat plate in horizontal airflow under the influence of thermophoresis Aerosol Science and Technology 49 920-263
- [8] Chang Y. P.(2000)Particle characteristics of 300-mm minienvironment (FOUP and LPU) IEEE Transactions on Semiconductor Manufacturing 13 259-77
- [9] Lin T. Y.(2015)Dynamic boundary conditions for a coupled convection-diffusion model with heat effects:Applications in cross-contamination control International Journal of Applied Mathematical Research 4 58-957
- [10] Bae G. N.(2016)Experimental study on the moisture removal of a 450-mm FOUP during the purge or vacuum process Applied Thermal Engineering 108 951-158