Natural convection flow around heated disk in cubical enclosure

被引:0
作者
Dong-Bin Kwak
Jung-Hun Noh
Se-Jin Yook
机构
[1] Hanyang University,School of Mechanical Engineering
[2] Institute for Advanced Engineering,R&D Center for Research & Business Cooperation Mechatronics Team
来源
Journal of Mechanical Science and Technology | 2018年 / 32卷
关键词
Natural convection; Cubical enclosure; Circular disk; Local Nusselt number;
D O I
暂无
中图分类号
学科分类号
摘要
In this study, a numerical analysis of the natural convection characteristics around a circular disk in a cubical enclosure was carried out. The disk and the enclosure were used to simulate a wafer placed in a front-opening unified pod. The disk position, size, and temperature were considered as the main variables, and the effects of each variable on the isotherm, streamline, and local Nusselt number were examined. The results confirmed that the disk position and size in an enclosure had greater effects on the natural convection flow pattern than the disk temperature. Because air flowed in from the edge of the disk, the local Nusselt number was the highest at the edge of the disk. It was also found that a large disk size generated a plume and formed a new thermal boundary layer.
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页码:2377 / 2384
页数:7
相关论文
共 74 条
  • [1] Ye Y.(1991)Thermophoretic effect of particle deposition on a free standing semiconductor wafer in a clean room Journal of Aerosol Science 22 63-72
  • [2] Pui D. Y. H.(1998)Combined effects of thermophoresis and electrophoresis on particle deposition onto a wafer Journal of Aerosol Science 29 811-825
  • [3] Liu B. Y. H.(1995)Measurements and control of particle deposition velocity on a horizontal wafer with thermophoretic effect Aerosol Science and Technology 23 321-330
  • [4] Opiolka S.(2006)Combined effects of inertia and thermophoresis on particle deposition onto a wafer with wavy surface International Journal of Heat and Mass Transfer 49 1395-1402
  • [5] Blumhorst S.(2012)Gaussian diffusion sphere model to predict deposition velocity onto wafers in laminar parallel airflow considering thermophoresis The European Physical Journal Plus 127 132-10
  • [6] Fissan H.(2012)Statistical Lagrangian particle tracking approach to investigate the effect of thermophoresis on particle deposition onto a face-up flat surface in a parallel airflow Journal of Aerosol Science 44 1-927
  • [7] Tsai R.(2015)Local behavior of deposition velocity onto a flat plate in horizontal airflow under the influence of thermophoresis Aerosol Science and Technology 49 920-263
  • [8] Chang Y. P.(2000)Particle characteristics of 300-mm minienvironment (FOUP and LPU) IEEE Transactions on Semiconductor Manufacturing 13 259-77
  • [9] Lin T. Y.(2015)Dynamic boundary conditions for a coupled convection-diffusion model with heat effects:Applications in cross-contamination control International Journal of Applied Mathematical Research 4 58-957
  • [10] Bae G. N.(2016)Experimental study on the moisture removal of a 450-mm FOUP during the purge or vacuum process Applied Thermal Engineering 108 951-158