Features of the Formation of Ripple Structures on the Surface of Silicon under Irradiation with a Focused Gallium Ion Beam

被引：0
|
作者：
M. A. Smirnova
V. I. Bachurin
L. A. Mazaletsky
D. E. Pukhov
A. B. Churilov
A. S. Rudy
机构：
[1] Valiev Institute of Physics and Technology,
[2] Yaroslavl Branch,undefined
[3] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2021年 / 15卷
关键词：
sputtering; ripple relief; focused ion beam;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
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页码：S150 / S156
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