Features of the Formation of Ripple Structures on the Surface of Silicon under Irradiation with a Focused Gallium Ion Beam

被引：0

作者：

M. A. Smirnova

V. I. Bachurin

L. A. Mazaletsky

D. E. Pukhov

A. B. Churilov

A. S. Rudy

机构：

[1] Valiev Institute of Physics and Technology,

[2] Yaroslavl Branch,undefined

[3] Russian Academy of Sciences,undefined

来源：

Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2021年 / 15卷

关键词：

sputtering; ripple relief; focused ion beam;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：S150 / S156

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