Acoustic Microscopy in Micrometrology

被引：0

作者：

Kuznetsov V.S. ^{[1
]}

Ogorodnikov S.A. ^{[1
]}

Preobrazhenskii M.N. ^{[2
]}

Prokaznikov A.V. ^{[2
]}

机构：

[1] Demidov State University, Yaroslavl, 150000

[2] Institute of Microelectronics, Russian Academy of Sciences, Yaroslavl, 150007

来源：

Russian Microelectronics | 2001年 / 30卷 / 1期

关键词：

Microscopy; Acoustic Signal; Recording Time; Excitation Condition; Radio Pulse;

D O I：

10.1023/A:1009417724233

中图分类号：

学科分类号：

摘要：

In-depth analysis of the propagation of an acoustic signal excited by a short radio pulse is performed. The signal is reflected from the simple lens of a scanning acoustic microscope, and its power is detected. An expression for V(z) curve (acoustic signature of a material) is derived. It takes into account excitation conditions (delay and recording times of a signal to be detected) and lens parameters.

引用

页码：29 / 34

页数：5

共 11 条

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