Effect of Proton Irradiation on the Properties of High-Voltage Integrated 4H-SiC Schottky Diodes at Operating Temperatures

被引:0
作者
A. A. Lebedev
V. V. Kozlovskii
M. E. Levinshtein
D. A. Malevskii
G. A. Oganesyan
机构
[1] loffe Institute,
[2] Peter the Great Saint-Petersburg Polytechnic University,undefined
来源
Semiconductors | 2023年 / 57卷
关键词
silicon carbide; Schottky diodes; proton irradiation; current-voltage characteristics; annealing;
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页码:125 / 129
页数:4
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