Sensitivity of mos sensors to hydrogen, hydrogen sulfide, and nitrogen dioxide in different gas atmospheres

被引：0
|
作者：
E. V. Emelin
I. N. Nikolaev
机构：
来源：
Measurement Techniques | 2006年 / 49卷
关键词：
MOS sensor; gas analyzer; hydrogen; hydrogen sulfide; nitrogen dioxide;
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学科分类号：
摘要：
The sensitivity of metal-oxide-semiconductor (MOS) sensors of the Pd-Ta2O5-SiO2-Si type towards hydrogen, hydrogen sulfide and nitrogen dioxide is measured in atmospheres of air, nitrogen, and oxygen. It is demonstrated that MOS sensors are efficient in any chemically noncorrosive gas atmosphere, and also in a vacuum.
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页码：524 / 528
页数：4
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