Suppression of Interdiffusion in Copper/Tin Thin Films

被引:0
|
作者
Harald Etschmaier
Holger Torwesten
Hannes Eder
Peter Hadley
机构
[1] Infineon Technologies Austria AG,Institute of Solid State Physics
[2] Graz University of Technology,undefined
来源
Journal of Materials Engineering and Performance | 2012年 / 21卷
关键词
coatings; electronic materials; heat treating; joining; metallography;
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学科分类号
摘要
Copper/tin thin film couples are often used in microelectronics assembly as device backside coatings for die attach and also as circuit board coatings to maintain solderability. In this article, we report a temperature treatment that slows down the room temperature reaction of these two metals and therefore can extend the storage life of the devices significantly. It was found by x-ray diffraction that during an anneal at 473 K for 1 minute a thin layer of the Cu/Sn ε-phase is formed which introduces an additional interface to the system. The diffusion suppressing effect of this treatment was studied by focused ion beam microscopy.
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页码:1724 / 1727
页数:3
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