Capacitive humidity sensing properties of carbon nanotubes grown on silicon nanoporous pillar array

被引：0
作者：
WeiFen Jiang
ShunHua Xiao
HuanYun Zhang
YongFen Dong
XinJian Li
机构：
[1] Zhengzhou University,Department of Physics and Laboratory of Materials Physics
来源：
Science in China Series E: Technological Sciences | 2007年 / 50卷
关键词：
capacitive humidity sensor; carbon nanotubes (CNTs); silicon nanoporous pillar array (Si-NPA); CNT/Si-NPA;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Multi-walled carbon nanotubes (CNTs) were grown on silicon nanoporous pillar array (Si-NPA) by thermal chemical vapor deposition method, and the structural and capacitive humidity sensing properties of CNT/Si-NPA were studied. It was found that with the relative humidity (RH) changing from 11% to 95%, a device response of ∼480% was achieved at the frequency of 50000 Hz, and a linear device response curve could be obtained by adopting longitudinal logarithmic coordinate. The response/recovery times were measured to be ∼20 s and ∼10 s, respectively, which indicated a rather fast response/recovery rate. The adsorption-desorption dynamic cycle experiments demonstrated the high measurement reproducibility of CNT/Si-NPA sensors. These excellent performances were attributed to the unique surface structure, morphology and chemical inertness of CNT/Si-NPA.
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页码：510 / 515
页数：5
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