Design and Analysis of Non-spiral Planar Microcoil-Based Electromagnetic Microactuator

被引：0
作者：
S. Krishnapriya
Rama Komaragiri
K. J. Suja
机构：
[1] National Institute of Technology,
[2] Bennett University,undefined
来源：
Arabian Journal for Science and Engineering | 2019年 / 44卷
关键词：
Lab-on chip; Finite element method; Microactuator; Non-spiral planar microcoils; Tapered square geometry;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Lab-on-chip devices essentially require micropumps and valves which incorporate a microactuating mechanism to control fluid flow. In this work, a non-spiral type planar microcoil is reported for implementing an electromagnetic microactuator. The effect of variation in coil geometries on the microactuator performance is analyzed for the first time. The microcoil fabricated and characterized in this work considerably reduces the number of lithography layers, thus improving the ease of fabrication while reducing the series coil resistance. The microcoil structures are further analyzed for the microactuator performance using finite element method, and the effect of coil geometries on the electromagnetic force generated by the actuator is studied. Microfabrication and electrical characterization results of the non-spiral planar microcoils show the influence of the same on the actuator performance. A tapered square microcoil geometry is proposed to improve the outputs from the actuator.
引用
收藏
页码：6805 / 6811
页数：6
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