Design and performance Analysis of PDMS Based Micropump

被引：0
作者：
K. Srinivasa Rao
K. Chandrasekharam
S. Bandhavi Sai Sri
S. Suma
Md. Hamza
K. Grija Sravani
机构：
[1] Koneru Lakshmaiah Education Foundation (Deemed to be University),MicroElectronics Research Group, Department of ECE
[2] National Institute of Technology,National MEMS Design Center, Department of ECE
来源：
Transactions on Electrical and Electronic Materials | 2020年 / 21卷
关键词：
PDMS; Micropump; Flow Velocity; Flowrate; Bio-MEMS;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
This paper presents the design and performance analysis of MEMS based piezoelectrically actuated micropump for drug delivery systems. The proposed micropump have achieved a flow velocity and flow rate of 8.92 m/s and 0.854 mL/min respectively at 50 V when BaTiO3 is used as piezoelectric material. The micropump comprises of four elements: electrodes, piezoelectric layer, flexible membrane and a reservoir. The obtained flow rate for the micropump is best suitable in cardio-vascular, hypertension cases where the drug need to be delivered with an appropriate flowrate.
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页码：497 / 502
页数：5
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