A Study of Ultrathin Superconducting Films of Niobium Nitride Obtained by Atomic Layer Deposition

被引：0
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作者：
M. V. Shibalov
N. V. Porokhov
A. M. Mumlyakov
I. V. Trofimov
G. D. Dyud’bin
E. R. Timofeeva
A. M. Tagachenkov
Yu. V. Anufriev
E. V. Zenova
M. A. Tarkhov
机构：
[1] Institute of Nanotechnology of Microelectronics of the Russian Academy of Sciences,
来源：
Technical Physics | 2021年 / 66卷
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页码：658 / 663
页数：5
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