Superconducting Transition-Edge Sensor Bolometers with Integrated Electron-tunneling Refrigerators

We discuss the development of an array of superconducting Transition-Edge Sensor (TES) bolometers intended for use at millimeter wavelengths. Each bolometer in the array uses a proximity-effect TES sensing element and each has integrated Normal-Insulator-Superconductor (NIS) refrigerators to cool the bolometer below the reference bath temperature. The NIS refrigerators and bolometers are fabricated on a single Silicon substrate. Four short, thin and narrow legs suspend the millimeter wavelength radiation-absorbing element. The leg geometry is used to control and optimize the thermal conductance of the bolometer. Using the technology developed at NIST, we fabricated NIS refrigerators at the base of each of the suspension legs. These NIS refrigerators remove hot electrons by quantum-mechanical tunneling and should be capable of reducing the temperature of the biased (∼10 pW) bolometers by more than 100 mK when operating from a local thermal reservoir provided by a 3He system at ∼300 mK. This lower temperature at the bolometer will allow the detectors to approach background-limited performance despite the simple cryogenic system. In this paper we describe the progress toward the development of these detectors designed for use in observations at the 100 m Green Bank Telescope at 3 mm wavelength and the results of laboratory tests of a prototype detector.