Investigation of Ta/Ni bilayered ohmic contacts on n-type SiC single-crystal substrate

被引：0

作者：

Ruifang Li

Zhongnan Guo

Jingjing Yang

Xiaopeng Zeng

Wenxia Yuan

机构：

[1] University of Science and Technology Beijing,School of Chemical and Biological Engineering

来源：

Monatshefte für Chemie - Chemical Monthly | 2012年 / 143卷

关键词：

SiC; Interfacial reaction; Electrical properties; Ohmic contact;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1329 / 1334

页数：5

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