Fabrication of submicron-sized copper structures on pre-patterned self-assembled monolayer and Langmuir-Blodgett films

被引：0
|
作者：
Inhee Choi
Younghun Kim
Sung Koo Kang
Jeongjin Lee
Jongheop Yi
机构：
[1] Seoul National University,School of Chemical and Biological Engineering, Institute of Chemical Processes
来源：
Korean Journal of Chemical Engineering | 2005年 / 22卷
关键词：
AFM Anodic Oxidation; Copper; Self-assembled Monolayer; Langmuir-Blodgett Film;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The fabrication of a metal microstructure on pre-patterned organic templates, prepared using SAM and LB techniques is described. The OTS derivatized substrate was oxidized by AFM anodic oxidation at the threshold voltage. Site-selective copper structure was then fabricated on the locally modified monolayer based on pre-designed patterns. The sequential adsorption-reduction of copper ion was carried out, leading to improved metal coverage and a reduction in defects.
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页码：635 / 638
页数：3
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