Investigations of ZnO thin films deposited by a reactive pulsed laser ablation

被引：0
作者：
J. B. Cui
Y. C. Soo
H. Kandel
M. A. Thomas
T. P. Chen
C. P. Daghlian
机构：
[1] University of Arkansas at Little Rock,Department of Physics and Astronomy
[2] Dartmouth College,E. M. Facilities
来源：
Science in China Series E: Technological Sciences | 2009年 / 52卷
关键词：
thin films; pulsed laser deposition; optical property; zinc oxide;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Highly transparent ZnO thin films were deposited at different substrate temperatures by pulsed laser deposition in an oxygen atmosphere. The thin films were characterized by various techniques including X-ray diffraction, scanning electron microscopy, optical absorption, and photoluminescence. We demonstrated that oriented wurtzite ZnO thin films could be deposited at room temperature using a high purity zinc target. Variable temperature photoluminescence revealed new characteristics in the band edge emission. The underlying mechanism for the observed phenomena was also discussed.
引用
收藏
页码：99 / 103
页数：4
相关论文
共 48 条
[1]  
Jeong M. C.(2004)Comparative study on the growth characteristics of ZnO nanowires and thin films by metalorganic chemical vapor deposition (MOCVD) J Cryst Growth 268 149-154
[2]  
Oh B. Y.(2001)Catalytic growth of zinc oxide nanowires by vapor transport Adv Mater 13 113-116
[3]  
Lee W.(2001)Initial preferred growth in zinc oxide thin films on Si and amorphous substrates by a pulsed laser deposition J Cryst Growth 226 493-500
[4]  
Huang M. H.(2003)Low-temperature wafer-scale production of ZnO nanowire arrays Angew Chem Int Ed 42 3031-3034
[5]  
Wu Y. Y.(2005)Enhanced nucleation, growth rate and dopant incorporation of ZnO nanowires J. Phys. Chem. B 109 22074-22077
[6]  
Feick H.(2006)Role of low O-2 pressure and growth temperature on electrical transport of PLD grown ZnO thin films on Si substrates Solid-State Electr 50 1119-1123
[7]  
Choi J. H.(2004)ZnO nano-rods synthesized by nano-particle-assisted pulsed-laser deposition Appl Phys A 79 1417-1419
[8]  
Tabata H.(2007)Structural and optical properties of ZnO thin films on glass substrate grown by laser-ablating Zn target in oxygen atmosphere Physica B 396 95-101
[9]  
Kawai T.(2006)ZnO thin films on Si(111) grown by pulsed laser deposition from metallic Zn target Appl Surf Sci 253 841-845
[10]  
Greene L. E.(2008)Defect control and its influence on exciton emission of electrodeposited ZnO nanorods J Phys Chem C 112 10385-10388
12345