Composition determination of multicomponent chalcogenide glassy semiconductors with X-ray fluorescence analysis

The standard method-recording of X-ray fluorescence spectra of a standard Ge0.2As0.4Se0.4 alloy followed by evaluation of its component spectral fractions and by building of dependences xXRF = f(x) and yXRF = f(y) for the Asx(GeySe1 − y)1 − x system—was employed to determine the quantitative contents of arsenic, germanium, and selenium in the GetAssSe1 − t − s glassy alloys with X-ray fluorescence analysis. The accuracy of the composition’s determination was ±0.0005 for both x and y. However, it was not possible to use the external standard method for determining the tellurium in AsySe1 − y)1 − xTex alloys because tellurium, arsenic, and selenium had significantly different X-ray fluorescence characteristics and, hence, substitution of the arsenic or selenium for tellurium at a fixed y resulted in tellurium emission fraction changing.