Formation of microstructures on Ni film surface by nanosecond laser irradiation

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作者：
Kazuki Koda
Wataru Kobayashi
Hirokazu Imai
Masahiro Tsukamoto
机构：
[1] DENSO Corporation,Semiconductor Packaging Reserach and Development
[2] Osaka University,Department of Mechanical Engineering, Graduate School of Engineering
[3] Osaka University,Joining and Welding Research Institute
来源：
Applied Physics A | 2018年 / 124卷
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摘要：
The formation of microstructures on a Ni film surface by nanosecond laser irradiation was investigated. The microstructures were formed by the interaction between the laser-induced plume and the film surface. The laser process was conducted in air and under slight vacuum pressure. The microstructures were formed around the laser-irradiated area and transitioned from a layer to flocculating structures upon repeated laser irradiation. The conifer-like structure was formed by scanning the laser. In addition, it was not formed under low pressure as a result of which the confinement effect of the plume was weak. Surface and cross-sectional observation suggested that the diffusion of nanoparticles on the film surface shaped the topography of the microstructure.
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