Structure and properties of nanocomposite Mo—Si—B—(N) coatings

Coatings in the Mo—Si—B—(N) system are obtained using the magnetron sputtering method. Control of nitrogen and silicon content in the coatings is carried out using various gaseous Ar + N2 mixtures and variation of the number of Si segments in the area of MoSiB target erosion. The structure of coatings is studied using methods of scanning and transmission electron microscopy, X-ray analysis, infrared and optical emission spectroscopy, and Raman spectroscopy. Mechanical and tribological properties of the coatings are determined using methods of nanoindentation, scratch-testing, and tribological testing at temperatures of 25, 500, and 700°C. The oxidation resistance of coatings is studied. It is established that coatings with maximum Si and N content possess the best properties: hardness of 32 GPa, elastic recovery of 66%, low friction coefficient at high temperatures, and heat resistance up to 1200°C.