Absolute populations of argon metastable states in an rf discharge plasma

被引：0
|
作者：
B. T. Baisova
V. I. Strunin
N. N. Strunina
G. Zh. Khudaibergenov
机构：
[1] Omsk State University,
来源：
Technical Physics | 2003年 / 48卷
关键词：
Argon; Metastable State; Discharge Plasma; Pure Argon; Absolute Population;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Absolute populations of argon metastable states in the plasma of an rf discharge in pure argon and an argon-silane mixture are determined.
引用
收藏
页码：969 / 971
页数：2
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