Absolute populations of argon metastable states in an rf discharge plasma

被引:0
|
作者
B. T. Baisova
V. I. Strunin
N. N. Strunina
G. Zh. Khudaibergenov
机构
[1] Omsk State University,
来源
Technical Physics | 2003年 / 48卷
关键词
Argon; Metastable State; Discharge Plasma; Pure Argon; Absolute Population;
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中图分类号
学科分类号
摘要
Absolute populations of argon metastable states in the plasma of an rf discharge in pure argon and an argon-silane mixture are determined.
引用
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页码:969 / 971
页数:2
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