Absolute populations of argon metastable states in an rf discharge plasma

被引：0
|
作者：
B. T. Baisova
V. I. Strunin
N. N. Strunina
G. Zh. Khudaibergenov
机构：
[1] Omsk State University,
来源：
Technical Physics | 2003年 / 48卷
关键词：
Argon; Metastable State; Discharge Plasma; Pure Argon; Absolute Population;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Absolute populations of argon metastable states in the plasma of an rf discharge in pure argon and an argon-silane mixture are determined.
引用
收藏
页码：969 / 971
页数：2
相关论文
共 50 条
  • [11] The role of carrier gases in the production of metastable argon atoms in a rf discharge
    Rudinger, Kenneth
    Lu, Zheng-Tian
    Mueller, Peter
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2009, 80 (03):
  • [12] COMPARISON OF SATURATION CONCENTRATIONS OF METASTABLE STATES OF ARGON IN A POSITIVE-COLUMN AND IN A SURFATRON-TYPE RF DISCHARGE
    MOISAN, M
    RICARD, A
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1976, 21 (05): : 813 - 813
  • [13] DENSITY OF METASTABLE STATES OF ARGON IN A SPUTTERING GLOW-DISCHARGE
    FOURRIER, C
    LEMPERIERE, G
    POITEVIN, JM
    PHYSICS LETTERS A, 1979, 74 (05) : 313 - 315
  • [14] Coagulation of dust grains in the plasma of an RF discharge in argon
    Yu. A. Mankelevich
    M. A. Olevanov
    A. F. Pal’
    T. V. Rakhimova
    A. N. Ryabinkin
    A. O. Serov
    A. V. Filippov
    Plasma Physics Reports, 2009, 35 : 191 - 199
  • [15] Coagulation of dust grains in the plasma of an RF discharge in argon
    Mankelevich, Yu. A.
    Olevanov, M. A.
    Pal', A. F.
    Rakhimova, T. V.
    Ryabinkin, A. N.
    Serov, A. O.
    Filippov, A. V.
    PLASMA PHYSICS REPORTS, 2009, 35 (03) : 191 - 199
  • [16] Coagulation of dust particles in argon plasma of RF discharge
    Mankelevich, Yu. A.
    Olevanov, M. A.
    Pal, A. F.
    Rakhimova, T. V.
    Ryabinkin, A. N.
    Serov, A. O.
    Filippov, A. V.
    MULTIFACETS OF DUSTY PLASMA, 2008, 1041 : 295 - +
  • [17] Effect of RF on RF nitrogen discharge with induced argon plasma at high pressure
    Wang, Yinan
    Liu, Yue
    Zheng, Shu
    Lin, Guoqiang
    JOURNAL OF PLASMA PHYSICS, 2012, 78 : 673 - 676
  • [18] INFLUENCE OF METASTABLE ARGON ATOMS AND DUST PARTICLES ON GAS DISCHARGE PLASMA
    Fedoseev, A. V.
    Sukhinin, G. I.
    UKRAINIAN JOURNAL OF PHYSICS, 2011, 56 (12): : 1272 - 1275
  • [19] Metastable argon densities in the E-H transition region of RF driven discharge
    Moshkalyov, SA
    Graham, WG
    Mahony, CMO
    Steen, PG
    Gomez, S
    INTERNATIONAL CONFERENCE ON PHENOMENA IN IONIZED GASES, VOL V, PROCEEDINGS, 1999, : 27 - 27
  • [20] Kinetics of Metastable Argon Atoms in an Ar-N2 RF ICP Discharge
    Kang, Namjun
    Oh, Soo-ghee
    Ricard, Andre
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2011, 58 (04) : 776 - 781
12345