An analytical formula and FEM simulations for the viscous damping of a periodic perforated MEMS microstructure outside the lubrication approximation

被引:0
|
作者
Dorel Homentcovschi
Bruce T. Murray
Ronald N. Miles
机构
[1] SUNY Binghamton,Department of Mechanical Engineering
[2] “Politechnica” University of Bucharest,undefined
来源
Microfluidics and Nanofluidics | 2010年 / 9卷
关键词
Perforated microstructures; Viscous damping; MEMS microphones; Navier–Stokes equations;
D O I
暂无
中图分类号
学科分类号
摘要
The article presents an axi-symmetrical model for determining the total damping coefficient of a periodic perforated microelectromechanical systems (MEMS) microstructure for cases where the lubrication approximation yielding the Reynolds’ equation is no longer appropriate. Damping is modeled by solving for the viscous flow in an approximation of the periodic cell geometry using an equivalent axi-symmetrical cylindrical flow domain. Using the Stokes approximation of the incompressible Navier–Stokes (N–S) equations with harmonic time behavior, an analytic solution is obtained yielding an explicit formula for the damping coefficient. Additionally, two numerical models were implemented based on the finite element method. Numerical solutions were obtained for the linearized, viscous acoustic equations (time harmonic) and the steady, incompressible N–S equations. The results given by the analytical formula compare well with those obtained from the FEM solutions and with measured values for MEMs microstructures found in the literature.
引用
收藏
页码:865 / 879
页数:14
相关论文
共 2 条