Analysis of the kinetics of crystal growth and epitaxy in the framework of the multilayer model of mass crystallization

The method for calculating the kinetics of crystal growth and epitaxy based on the two-dimensional model of the mass crystallization in many atomic layers has been developed. The kinetics of crystal growth is analyzed with due regard for the initial (critical) size of two-dimensional nuclei, the dependence of the growth rate of two-dimensional nuclei on their size, and the non-steady-state frequency of the formation of two-dimensional nuclei. The effect of characteristic parameters of crystallization on the kinetics of formation of epitaxial films and structure is also studied.