Optical properties of the Si-doped GaN/Al2O3 films

被引:4
作者
Zayats, N. S. [1 ]
Gentsar, P. O. [1 ]
Boiko, V. G. [1 ]
Litvin, O. S. [1 ]
Vuychik, M. V. [1 ]
Stronski, A. V. [1 ]
Yanchuk, I. B. [1 ]
机构
[1] Natl Acad Sci Ukraine, Lashkarev Inst Semicond Phys, UA-03028 Kiev, Ukraine
关键词
VAPOR-PHASE EPITAXY; GAN; RAMAN; SPECTROSCOPY; BEHAVIOR;
D O I
10.1134/S106378260905008X
中图分类号
O469 [凝聚态物理学];
学科分类号
070205 ;
摘要
Morphological and optical studies of the Si-doped GaN films (doping level N (Si) = 1.5 x 10(19) cm(-3)) grown by vapor-phase epitaxy from metalorganic compounds on a sapphire substrate oriented along the c axis are conducted. For the grown GaN films, the following characteristics are obtained: energy of electron transition E (0), absorption coefficient alpha, refractive index n, and frequencies of transverse and longitudinal optical lattice vibrations characteristic of the crystalline GaN films.
引用
收藏
页码:590 / 593
页数:4
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