Study of the spectral dependence of the absorption coefficient of undoped silicon-carbon films

被引：0
|
作者：
M. D. Malinkovich
Yu. N. Parkhomenko
M. L. Shupegin
A. P. Bliev
A. V. Gritsenko
机构：
[1] Malinkovich, M.D.
[2] Parkhomenko, Yu.N.
[3] Shupegin, M.L.
[4] Bliev, A.P.
[5] Gritsenko, A.V.
来源：
Malinkovich, M.D. | 1600年 / Maik Nauka Publishing / Springer SBM卷 / 41期
关键词：
Organosilicon - Electron transitions - Silicon;
D O I：
10.1134/S1063739712080112
中图分类号：
学科分类号：
摘要：
The spectral dependence of the absorption coefficient in the wavelength range from 190 nm to 1.9 μm of undoped silicon-carbon films synthesized from organosilicon liquid of polyphenylmethylsiloxane (PPMS) by high-frequency deposition from plasma of PPMS vapors is studied. The shortwave absorption region of the films is shown to be nonmonotonic: it contains electron transitions of different kinds, probably including interband ones. © Pleiades Publishing, Ltd., 2012.
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页码：489 / 490
页数：1
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