Evaluation of the Characteristics of X-Ray Excitation under the Electron-Probe Effect Using 2D and 3D Modeling by the Monte Carlo Method

被引：0
作者：
V. V. Tatarinov
A. S. Kuzakov
机构：
[1] Vinogradov Institute of Geochemistry,
[2] Siberian Branch,undefined
[3] Russian Academy of Sciences,undefined
[4] Irkutsk Branch of the Institute of Laser Physics,undefined
[5] Siberian Branch,undefined
[6] Russian Academy of Sciences,undefined
来源：
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques | 2020年 / 14卷
关键词：
X-ray electron-probe microanalysis; scanning electron microscopy; simulation; Monte Carlo; X-ray excitation; sample depth distribution; lateral distribution; radial distribution; and spatial resolution;
D O I：
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学科分类号：
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页码：245 / 252
页数：7
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