Kinetic modelling of a discharge-pumped ArF excimer laser and the effects of discharge filamentation

被引：0

作者：

A.V. Demyanov

L. Feenstra

P.J.M. Peters

A.P. Napartovich

W.J. Witteman

机构：

[1] Troitsk Institute of Innovative and Thermonuclear Research (TRINITI),

[2] Troitsk 142092,undefined

[3] Moscow Province,undefined

[4] Russia (E-mail: apn@triniti.ru),undefined

[5] Laser Centre Vrije Universiteit,undefined

[6] Department of Physics and Astronomy,undefined

[7] De Boelelaan 1081,undefined

[8] 1081 HV Amsterdam,undefined

[9] The Netherlands,undefined

[10] University of Twente,undefined

[11] Faculty of Applied Physics,undefined

[12] Quantum Electronics Group,undefined

[13] P.O. Box 217,undefined

[14] 7500 AE Enschede,undefined

[15] The Netherlands,undefined

来源：

Applied Physics B | 2001年 / 72卷

关键词：

PACS: 42.55.Lt; 52.65.-y; 52.80.Hc; 42.60.By;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Results of kinetic modelling of an X-ray preionised, discharge-pumped ArF excimer laser, operating with a spiker-sustainer circuit are presented. The parallel-resistor model includes the complete ArF laser kinetics and calculations of the Boltzmann equation in each layer taking into account the effects of electron–electron and super-elastic collisions. The model further includes a detailed description of the electrical circuit and the formation of filaments with a realistic electrode profile. This model shows a good correspondence with the experimental results in predicting laser energy and optical behaviour. Neglecting the formation of filaments and the electron–electron and super-elastic collision processes yields remarkably poorer results. Parametric studies on the electrode profile, the formation of micro-arcs and on the electrical circuit parameters were performed numerically.

引用

页码：823 / 833

页数：10