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- [1] Teleshevsky V. I.(1997)undefined Proc. 4th Conf. Ultraprecision in Manufacturing Engineering, Germany 1 71-undefined
A heterodyne laser interferometer with digital phase conversion
被引：0
作者：
V. I. Teleshevskii
S. G. Grishin
机构：
来源：
Measurement Techniques
|
2006年
/
49卷
关键词：
heterodyne interferometry;
laser measurement system;
digital phase detector;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The structure and metrological properties have been determined for processing with digital logic applicable to a wide range of heterodyne laser interference systems employing digital phase monitoring in the submicrometer and nanometer resolving power ranges.
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页码：545 / 551
页数：6
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