High-Power 4H-SiC MOSFET with an Epitaxial Buried Channel

被引:0
作者
A. I. Mikhaylov
A. V. Afanasyev
V. A. Ilyin
V. V. Luchinin
S. A. Reshanov
A. Schöner
机构
[1] Saint Petersburg Electrotechnical University “LETI”,
[2] Ascatron AB,undefined
来源
Semiconductors | 2020年 / 54卷
关键词
4; -SiC; epitaxy; transistor channel; MOSFET;
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学科分类号
摘要
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页码:122 / 126
页数:4
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