Propagation of Microplasma Discharge over Titanium Surface Covered with Thin Dielectric Film

被引：0
作者：
V. A. Ivanov
M. E. Konyzhev
T. I. Kamolova
A. A. Dorofeyuk
机构：
[1] Prokhorov General Physics Institute of the Russian Academy of Sciences,
来源：
Plasma Physics Reports | 2021年 / 47卷
关键词：
microplasma discharge; interaction; titanium; dielectric film; propagation; microcrater;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：603 / 610
页数：7
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