Effect of annealing on ferroelectric properties of Bi3.25La0.75Ti3O12 thin films prepared by the sol-gel method

被引:0
作者
Guo D. [1 ]
Wang Y. [1 ]
Yu J. [1 ]
Gao J. [1 ]
机构
[1] Department of Electronic Science and Technology, Huazhong University of Science and Technology
来源
Journal of Wuhan University of Technology-Mater. Sci. Ed. | 2005年 / 20卷 / 4期
关键词
Bi[!sub]3.25[!/sub]La[!sub]0.75[!/sub] Ti[!sub]3[!/sub]O[!sub]12[!/sub; Ferroelectric thin film; Leakage current; Sol-gel method;
D O I
10.1007/BF02841273
中图分类号
学科分类号
摘要
Bi3.25La0.75Ti3O12 (BLT) thin films were prepared on Pt/Ti/SiO2/Si substrate by the sol-gel method. The effect of annealing on their structures and ferroelectric properties was investigated. The XRD patterns indicate that the BLT films annealed at different temperatures are randomly orientated and the single perovskite phase is obtained at 550°C. The remnant polarization increases and the coercive field decreases with the annealing temperature increasing. The leakage current density of the BLT films annealed at 700°C is about 5.8 × 10-8 A/cm at the electric field of 250 kV/cm.
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页码:20 / 21
页数:1
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  • [1] Scott J.F., Araujo C.A., Ferroelectric memories, Science, 246, pp. 1400-1405, (1989)
  • [2] Angus K., Memories Are Made of Nature, 401, pp. 658-659, (1999)
  • [3] Chen H.D., Udayakumar K.R., Gaskey C.J., Et al., Electrical properties' maxima in thin films of the lead zirconate-lead titanate solid solution system, Appl. Phys. Lett., 67, pp. 3411-3413, (1995)
  • [4] Nakamura T., Nakao Y., Kamisawa A., Et al., Preparation of Pb (Zr, Ti)O<sub>3</sub> thin films on electrodes including IrO<sub>2</sub>, Appl. Phys .Lett., 65, pp. 1522-1524, (1994)
  • [5] Dat R., Lee J.K., Auciello O., Et al., Pulsed laser ablation synthesis and characterization of layered Pt/SrBi<sub>2</sub>Ti<sub>2</sub> O<sub>9</sub>/Pt ferroelectric capacitors with practically no polarization fatigue, App. Phys .Lett., 67, pp. 572-574, (1995)
  • [6] Park B.H., Kang B.S., Bu S.B., Et al., Lanthanum-substituted bismuth titanate for use in non-volatile memories, Nature, 401, pp. 682-684, (1999)
  • [7] Kim H.I., Song Y.S., Sok J., Et al., Effect of la doping on structural and electrical properties of ferroelectric Bi<sub>4-x</sub> La<sub>x</sub> Ti<sub>3</sub> O<sub>12</sub> Thin films prepared by chemical solution deposition, Thin Solid Films, 429, pp. 114-118, (2003)
  • [8] Ma T.P., Han J.P., Why is nonvolatile ferroelectric memory field-effect transistor still elusive?, IEEE Electron Device Tetters, 23, pp. 386-388, (2002)
  • [9] Kong L.B., Ma J., Randomly oriented Bi<sub>4</sub> Ti<sub>3</sub> O<sub>2</sub> Thin filns derived from a hybrid sol-gel process, Thin Solid Films, 379, pp. 89-93, (1998)