Resonance behavior of the sensitivity of acoustic-wave chemical gas sensors

The effect of the resonance enhancement of the sensitivity of acoustic-wave chemical sensors is the-oretically predicted and substantiated experimentally. This enhancement is due to the peculiarities of the excitation of standing waves in the multilayer structure of the sensors. The obtained results provide the basis for the purposeful regulation of sensor sensitivity by selecting their design parameters. The effect discovered also offers promise from the standpoint of methodology: at the resonance conditions, sound velocity in the adsorbent film can be measured to a high precision. These experiments provide information on the elastic, dielectric, viscous-flow, and other properties of film materials and on their phase composition.